XRR, EDXRF, XRD METROLOGY OPTIMIZED FOR HIGH-VOLUME MANUFACTURING
The Rigaku XTRAIA MF-2000 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
Designed for high-volume manufacturing
The XTRAIA MF-2000 is designed with high-volume 200 mm (and smaller wafer) manufacturing in mind: high-throughput thickness measurement by XRR and XRF, low-contamination wafer handling and pattern recognition-based position control for product wafer measurements, CE Marking and S2/S8 Compliance for semiconductor production clean room operation, compliance with SECS/GEM, high-reliability machine performance and low power consumption and cost of ownership. Available with open cassette and SMIF pod configurations.
COLORS™ enabling technology
COLORS™ X-ray optics were developed by Rigaku for the XTRAIA MF-2000 to enable measurements from small areas. COLORS beam modules couple a variety of XRF excitation sources with optics and are optimized to provide high brightness in small spots for a variety of thin film applications. With its own x-ray optics business, Rigaku is well-positioned develop and manufacture X-ray sources for current and future market needs.
FEATURES & BENEFITS
Micro-spot X-ray beams and pattern recognition
High-throughput, product-wafer measurements
Wide range of materials and applications
High resolution and precision covering thicknesses from Ångstroms to microns
For 200 mm (and smaller) wafers with open cassette and SMIF load port configurations
Available with SECS/GEM communication
Design based on SEMI S2 and SEMI S8
Pharmaceuticals have the power to change the world for the better, but before they can ever do that, they need to be proven safe and trustworthy. Here at Rigaku, we strive to make this a reality as the leading global scientific analytical instrumentation company specializing in X-ray and thermal analysis, and Raman spectroscopy.
To contribute to the enhancement of humanity through scientific and technological development.
Value our customers, value our people, and value our technology
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