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Rigaku Semiconductor Metrology Division
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ED-XRF, XRR and OPTICAL METROLOGY TOOLS

Hybrid Wafer Metrology

ONYX 3000

Micro-spot ED-XRF and Optical Inspection (2D-3D)

Onyx 3000 view 1

 

 

In-line non-destructive inspection and metrology for the semiconductor and micro-electronics industries ≤300 mm wafers

 

xhemis® ex-2000

ED-XRF and XRR for High-Volume Manufacturing

Image - XHEMIS EX-2000

 

Thickness, density, roughness, and composition of films on blanket wafers metrology tool for blanket wafers ≤200 mm

 

xTRAIA® MF-2000

Process XRR, ED-XRF, and XRD Metrology Fab Tool

XTRAIA MF-2000 Transparent

 

 

Blanket and patterned metal layer thickness and composition

 

xTRAIA® MF-3000

XRR, ED-XRF, XRD Metrology Optimized for High-Volume Manufacturing

XTRAIA MF3000

 

 

Blanket and patterned metal layer thickness and composition

 

XRR: X-ray Reflective Spectrometer | Typically for characterization of a multilayered sample

ED-XRF: Energy-dispersive X-ray fluorescence (ED-XRF) spectrometer

OPTICAL TOOLS: Hybrid wafer metrology combining micro-spot ED-XRF and 2D microscope, and 3D scanner for In-line non-destructive inspection and metrology.                  

HYBRID WAFER METROLOGY

 

APPLICATION SAMPLES



One recipe

HYBRID WAFER METROLOGY

Combining advanced X-ray and optical techniques, the ONYX 3000 offers a unique wafer metrology approach in many areas from FEOL through WLP, leading to in-line solutions for these processes. This sophisticated hybrid metrology tool enables high-throughput, in-line measurements on a blanket and product wafers ranging from ultra-thin single-layer films to multi-layer stacks.
Rigaku Yamanashi Japan BNW
Rigaku Yamanashi Factory - Japan

Who we are

Rigaku Semiconductor Metrology Division

Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

 
CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.
 
CORPORATE MOTTO
Value our customers, value our people, and value our technology.