Rigaku Semiconductor Metrology Division
Rigaku Global Website
rsmd@rigaku.com
1-888-362-2324
HOME
PRODUCTS
WDXRF Tools
AZX 400
WDA-3650
WaferX 310
XRR, EDXRF & Optical Tools
ONYX 3000
XHEMIS EX-2000
XTRAIA MF-2000
XTRAIA MF-3000 (MFM310)
TXRF Tools
TXRF 3800e
TXRF 3760
TXRF310Fab
TXRF-V310
APPLICATIONS
MEMORY
MRAM
PRAM (GST)
MEMS
Evaluation of MEMS Device Materials by WDXRF
Thickness & Composition of Piezoelectric PZT Films by WDXRF
Composition Mapping of a PZT Sputtering Target by WDXRF
POWER DEVICES
Power Device Back Side Electrode Thickness by WDXRF
Surface Contamination of (SiC, GaN) Power Device Wafers by TXRF
Evaluation of Wet Cleans in SiC Power MOSFET Fabrication by TXRF
PACKAGING
UBM/RDL - Thickness & Composition
Bump Inspection - Composition & Height
Pd Measurement on GaAs Wafer
LEARNING
Techniques
WDXRF
TXRF
XRR
Webinar Recordings
AZX 400 Adventures in WDXRF
Rigaku Journal
SUPPORT
Contact Rigaku Service
Request Training
SCHEDULE A CALL
Rigaku Semiconductor Metrology Division
Rigaku Global Website
rsmd@rigaku.com
1-888-362-2324
HOME
PRODUCTS
WDXRF Tools
AZX 400
WDA-3650
WaferX 310
XRR, EDXRF & Optical Tools
ONYX 3000
XHEMIS EX-2000
XTRAIA MF-2000
XTRAIA MF-3000 (MFM310)
TXRF Tools
TXRF 3800e
TXRF 3760
TXRF310Fab
TXRF-V310
APPLICATIONS
MEMORY
MRAM
PRAM (GST)
MEMS
Evaluation of MEMS Device Materials by WDXRF
Thickness & Composition of Piezoelectric PZT Films by WDXRF
Composition Mapping of a PZT Sputtering Target by WDXRF
POWER DEVICES
Power Device Back Side Electrode Thickness by WDXRF
Surface Contamination of (SiC, GaN) Power Device Wafers by TXRF
Evaluation of Wet Cleans in SiC Power MOSFET Fabrication by TXRF
PACKAGING
UBM/RDL - Thickness & Composition
Bump Inspection - Composition & Height
Pd Measurement on GaAs Wafer
LEARNING
Techniques
WDXRF
TXRF
XRR
Webinar Recordings
AZX 400 Adventures in WDXRF
Rigaku Journal
SUPPORT
Contact Rigaku Service
Request Training
SCHEDULE A CALL
PRODUCTS
PRODUCTS FOR SEMICONDUCTOR FAB
AZX 400
WDA-3650
WaferX 310
ONYX 3000
XHEMIS EX-2000
XTRAIA MF-2000
XTRAIA MF-3000 (MFM310)
TXRF 3800e
TXRF 3760
TXRF310Fab
TXRF-V310
