AZX 400

SEQUENTIAL WAVELENGTH DISPERSIVE XRF SPECTROMETER WITH ANALYTICAL FLEXIBILITY FOR PROCESS R&D AND LOW- VOLUME / HIGH-PRODUCT-MIX MANUFACTURING

CONSULT WITH AN EXPERT

FILM THICKNESS AND COMPOSITION MEASUREMENTS ON WAFERS, MEDIA DISKS, COUPONS, AND LARGE/HEAVY SAMPLESBlue Accent Line

Rigaku's unique AZX 400 sequential wavelength dispersive X-ray fluorescence (WDXRF) spectrometer was specifically designed to handle very large and/or heavy samples. Accepting samples up to 400 mm diameter, 50 mm thick and 30 kg mass, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology or elemental analysis of large samples.

XRF with customized sample adapter system

Having the versatility to adapt to your specific sample types and analysis needs, this WDXRF spectrometer is adaptable to various sample sizes and shapes using optional (made to order) adapter inserts. With a variable measurement spot (30 mm to 0.5 mm diameter, with 5-step automatic selection) and mapping capability with multi-point measurements to check for sample uniformity, this uniquely flexible instrument can dramatically streamline your quality control processes.

XRF with available camera and special lighting

Optional real-time camera allows the analysis area to be viewed within software. The operator has complete certainty as to what is being measured.

Traditional WDXRF analytical capabilities

All analytical capabilities of a traditional instrument are retained in this "large sample" variant. Analyze beryllium (Be) through uranium (U) with high-resolution, high-precision WDXRF spectroscopy, from solids to liquids and powders to thin films. Analyze wide composition ranges (ppm to tens of percent) and thicknesses (sub Å to mm). Optionally available is diffraction peak interference rejection, for optimal results for single-crystal substrates. Rigaku AZX 400 wavelength dispersive X-ray fluorescence (WDXRF) spectrometer complies with industry standards SEMI and CE.

AZX 400 applications

  • Sputtering target composition
  • Isolation films: SiO2, BPSG, PSG, AsSG, Si₃N₄, SiOF, SiON, etc.
  • High-k and ferro-dielectric films: PZT, BST, SBT, Ta₂O₅, HfSiOx
  • Metal films: Al-Cu-Si, W, TiW, Co, TiN, TaN, Ta-Al, Ir, Pt, Ru, Au, Ni, etc.
  • Electrode films: doped poly-Si (dopant: B, N, O, P, As), amorphous-Si, WSix, Pt, etc.
  • Other doped films (As, P), trapped inert gas (Ne, Ar, Kr, etc.), C (DLC)
  • Ferroelectric thin films, FRAM, MRAM, GMR, TMR; PCM, GST, GeTe
  • Solder bump composition: SnAg, SnAgCuNi
  • MEMS: thickness and composition of ZnO, AlN, PZT
  • SAW device process: thickness and composition of AlN, ZnO, ZnS, SiO2 (piezo film); Al, AlCu, AlSc, AlTi (electrode film)

AZX 400 accessories

  • Sample camera with special lighting allows the analysis point to be viewed on screen
  • Diffraction interference rejection provides accurate results for single-crystal substrates
  • Fundamental Parameters software for thin film analysis

 



FEATURES & BENEFITS

  • Large sample analysis
    • Up to 400 mm (diameter)
    • Up to 50 mm (thickness)
    • Up to 30 kg (mass)

  • Sample adapter system
    • Adaptable to various sample sizes

  • Measurement spot
    • 30 mm to 0.5 mm diameter
    • 5-step automatic selection

  • Mapping capability
    • Allows multipoint measurements

  • Sample view camera (option)

  • General purpose
    • Analyze Be - U
    • Elemental range: ppm to %
    • Thickness range: sub Å to mm

  • Diffraction interference rejection (option)
    • Accurate results for single-crystal substrates

  • Compliance with industry standards
    • SEMI, CE marking
  • Small footprint
    • 50% footprint of the previous model
VIEW AZX 400 Brochure

TRUSTED PARTNER

WHO WE ARE
Pharmaceuticals have the power to change the world for the better, but before they can ever do that, they need to be proven safe and trustworthy. Here at Rigaku, we strive to make this a reality as the leading global scientific analytical instrumentation company specializing in X-ray and thermal analysis, and Raman spectroscopy.

CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.

CORPORATE MOTTO
Value our customers, value our people, and value our technology
HubSpot Video

 

HOW WE WORK WITH YOU

Handshake_Icon

1 - FREE CONSULTATION

A CALL TO UNDERSTAND YOUR CHALLENGES

NEED TO REDUCE COSTS?

NEED A SPECIFIC APPLICATION?

HOW CAN WE HELP YOU?

CONTACT US
Video Play Icon

2 - GET A DEMO

SCHEDULE A DEMO ON YOUR TERMS

ON-DEMAND RECORDINGS

LIVE VIRTUAL & CUSTOM

IN-PERSON GROUPS & INDIVIDUAL

GET A DEMO
Sale_Icon

3 - GET A QUOTE

BUILD SOLUTIONS PACKAGE RIGHT FOR YOUR NEEDS

TECHNOLOGY

INSTALL & TRAINING

SUPPORT & SERVICE

GET A QUOTE