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SEMICONDUCTOR X-RAY METROLOGY tools

Cutting-edge Metrology Solutions for R&D and high-volume manufacturing

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RIGAKU SEMICONDUCTOR METROLOGY DIVISION

Semiconductors and Micro-electronics X-ray Metrology Solutions

for in-process R&D and high-volume manufacturing.

Rigaku Semiconductor Metrology Division specializes in providing XRF, XRD, and XRR metrology and inspection tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. 

With global 24/7 service and support, Rigaku Semiconductor Metrology Tools delivers cutting-edge solutions for yield enhancement and process development.

X-ray Metrology Tools

Advance Technology Square

Advanced Process Technology

 

Market needs:

  • 3D NAND
  • PCM
  • GAA-FET
  • 2.5/3D PKG

Technological Challenges

  • Ultra thin film
  • Formation ALD
  • High AR
  • 3D Integration
  • New Materials
  • Improve reliability

Our Solutions

  • Thickness
  • Composition
  • CD and profile
  • Tilt and overlay
  • Metal fill
  • Crystallinity
  • Texture
  • Surface metal contamination
  • High sensitivity
 Power Device Square

 Power Device
300 mm Si-IGBT, SiC, GaN, GaO, and Diamond

Market needs:

  • Si-IGBT
  • SiC-MOSFER
  • GaN-MOSFET
  • GaO-MOSFET

Technological Challenges

  • Reduce crystal defects
  • Improve reliability
  • New materials and dopants
  • High quality epitaxy

Our Solutions

  • Defect (BPD, TSD, etc.)
  • High resolutions
  • High throughput.
  • Surface metal contamination
  • Light element
  • Stacking film thickness and composition
  • Crystallinity and stress 200 mm full map
Si, GaAs, InP Sqaure

 IoT | MEMS | Sensor | RF device PZT, GST, TMR, AlN, AlCu, GaN/Si, GaAs, InP

Market needs:

  • MEMS
  • Filter
  • Sensor
  • GaN-HEMT

Technological Challenges

  • High performance and sensitivity
  • New materials
  • Packing
  • Improve reliability

Our Solutions

  • High precision
  • Stacking film thickness
  • Composition
  • Crystallinity
  • Texture 50 μm spot
  • Micro area 10 μm spot
  • Surface metal contamination

UPCOMING EVENTS

Rigaku Semiconductor Metrology Division at FCMN 2022
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FREE CONSULTATION

A CALL TO UNDERSTAND YOUR CHALLENGES
NEED TO REDUCE COSTS?
NEED A SPECIFIC APPLICATION?
HOW CAN WE HELP YOU?
CONTACT US
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GET A DEMO

SCHEDULE A DEMO ON YOUR TERMS
ON-DEMAND RECORDINGS
LIVE VIRTUAL & CUSTOM
IN-PERSON GROUPS & INDIVIDUAL
GET A DEMO
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GET A QUOTE

BUILD SOLUTIONS PACKAGE RIGHT FOR YOUR NEEDS
TECHNOLOGY
INSTALL & TRAINING
SUPPORT & SERVICE
GET A QUOTE

How we work with you

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1 - FREE CONSULTATION

A CALL TO UNDERSTAND YOUR CHALLENGES

NEED TO REDUCE COSTS?

NEED A SPECIFIC APPLICATION?

HOW CAN WE HELP YOU?

Contact Us
Videos_Icon From Rigaku Global Site

2 - GET A DEMO

SCHEDULE A DEMO ON YOUR TERMS

ON-DEMAND RECORDINGS

LIVE VIRTUAL & CUSTOM

IN-PERSON GROUPS & INDIVIDUAL

Sale_Icon

3 - GET A QUOTE

BUILD SOLUTIONS PACKAGE RIGHT FOR YOUR NEEDS

TECHNOLOGY

INSTALL & TRAINING

SUPPORT & SERVICE

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Who we are

Rigaku Semiconductor Metrology Division

Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.

CORPORATE MOTTO
Value our customers, value our people, and value our technology.