WDXRF Thickness and Composition of Piezoelectric PZT Films

WDXRF can monitor piezoelectric PZT film thickness and composition with high precision and throughput.

Thin PZT Repeatability Test

WDA-3650, 15 mm collimator, 60 sec count time

Thick PZT Repeatability Test

WDA-3650, 10 mm collimator, 40 sec count time

 

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