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Rigaku Semiconductor Metrology Division
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WD-XRF METROLOGY TOOLS

Flexible Element Analysis for Thin-films

AZX 400

Sequential WD-XRF spectrometer

AZX 400 Transparent Bcakground

 

Analytical flexibility for process R&D and low-volume manufacturing and high-product-mix

 

WDA-3650

SIMULTANEOUS WD-XRF spectrometer

Image - WDA-3650 - with autoloader 800x610

 

Film thickness and composition measurements on blanket wafers

 

Waferx 310

SIMULTANEOUS WD-XRF spectrometer

Image - WaferX 310 - 2018-11-21 800x610

 

In-line, simultaneous WD-XRF spectrometer for high-volume manufacturing
EXPLORE AZX 400
EXPLORE WDA-3650
EXPLORE WAFERX 310

MEASUABLE   ELEMENT

Be-U                                                           

Rigaku systems can easily measure Ultra-Light elements such as B, C, N, O. Mg, and Al with high-resolution capability.                                                       

ANALYZABLE STRUCTURE

Up to 20 stacked layers effectively analyzed 

Since the FP method can consider absorption by other layers, analyses of complex compounds or multi-layered samples are the significant strong point of our systems.

QUANTITATIVE METHOD

Advanced FP method is available     

FP (Fundamental Parameter) method (described below) enables thickness and composition analysis with one recipe.                                              

ANALYZABLE THICKNESS

Sub-angstrom to micron level            

Our systems use high-power X-ray tubes (4 kW) and can select multiple spectra for most elements. Therefore, we can apply a wide range of thicknesses.
Rigaku Yamanashi Japan BNW
Rigaku Yamanashi Factory - Japan

Who we are

Rigaku Semiconductor Metrology Division

Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

 
CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.
 
CORPORATE MOTTO
Value our customers, value our people, and value our technology.