XTRaIA® MF-3000
CONSULT AN EXPERT
PREVIOUS GENERATION MFM310
CONSULT AN EXPERT - XTRAIA MF-3000 (MFM310)
PROCESS XRR, XRF, AND XRD METROLOGY FAB TOOL
The Rigaku XTRAIA MF-3000 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.