CONSULT AN EXPERT - WaferX 310
WAFERX 310
Wavelength-Dispersive X-ray Fluorescence simultaneous spectrometer
CONSULT AN EXPERT - WaferX 310
IN-LINE, SIMULTANEOUS WD-XRF SPECTROMETER FOR HIGH-VOLUME MANUFACTURING
Rigaku's WaferX 310 represents the culmination of >40 years of experience in the X-ray fluorescence analysis of thin films on silicon wafers. Developed as an in-line metrology tool, it is ideally suited to 300 mm high-volume manufacturing environments.