Rigaku Logo 100px
Webinars_Icon

SEMICONDUCTOR METROLOGY WEBINAR

TOTAL REFLECTIVE X-RAY FLUORESCENCE (txrf)
FOR SEMICONDUCTOR MANUFACTURING 

 

In this webinar, you will find explore the TXRF techniques applied to Semiconductor metrology and wafer inspection. Its analytical advantages and explore ways it can be used in thin film quality control. Meredith Beebe breaks down the fundamentals of TXRF and will showcase examples of its use in solving manufacturing challenges.

You will learn:

    1. TXRF Advantages And Disadvantages
    2. TXRF Key Applications
    3. Importance Of Clean Wafer Substrates
    4. Principles Of Total Reflection X-ray Fluorescence
    5. W Rotating Anode Beam Selection
    6. W Source For Transition Metals
    7. W-M Line For Light Elements
    8. High Energy Line For Heavy Metals
    9. Using TXRF to Monitor Process Tool to Wafer Contamination
    10. Traditional TXRF
    11. Sweeping TXRF And Application Data
    12. Vapor Phase Decomposition Process
    13. VPD-ICP-MS Vs. VPD-TXRF

 

 

 

 

 

 

 

 

 

 

 

 

HubSpot Video

RECOMMENDED RIGAKU SEMICONDUCTOR METROLOGY TOOLS

TXRF 3800e

COMPACT TXRF SPECTROMETER

TXRF 3800e

 

 

Wafer Surface Contamination Metrology With Light Elements Sensitivity

 

TXRF 3760

COMPACT TXRF SPECTROMETER

Image - TXRF 3760 - 2018-11-27

 

Wafer Surface Contamination Metrology

 

 

TXRF310Fab

TXRF SPECTROMETER FOR HVM

Image - TXRF 310Fab - 2018-12-18

 

For The Highest Throughput Wafer Surface Contamination Metrology

 

TXRF-V310

INTEGRATED VPD-TXRF SPECTROMETER

TXRF-V310

 

For The Highest Sensitivity Wafer Surface Contamination Metrology

 

Meredith Beebe

Meredith Beebe | Semiconductor X-ray Metrology Specialist

Rigaku Americas Corporation  |  California, USA

meredith.beebe@rigaku.com

Meredith Beebe is a semiconductor X-ray metrology specialist with unique perspective having significant experience both as an end user in the fab as a process characterization engineer and as an applications expert for multiple vendors supporting customers with a broad range of technological challenges. Meredith has worked in the semiconductor industry for over 20 years and is a subject matter expert known across the industry for trace metal and contamination analyses employing X-rays, VPD-ICP-MS, SIMS, AFM, and Auger. Meredith helps people understand and develop improved strategies for contamination monitoring, metrology optimization, and she provides key insights from direct customer experience to contribute to Rigaku’s leadership in X‑ray metrology.