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TXRF METROLOGY TOOLS

Wafer Surface Contamination Metrology

TXRF 3800e

COMPACT TXRF SPECTROMETER

TXRF 3800e

 

 

Wafer Surface Contamination Metrology With Light Elements Sensitivity

 

TXRF 3760

COMPACT TXRF SPECTROMETER

Image - TXRF 3760 - 2018-11-27

 

Wafer Surface Contamination Metrology

 

 

TXRF310Fab

TXRF SPECTROMETER FOR HVM

Image - TXRF 310Fab - 2018-12-18

 

For The Highest Throughput Wafer Surface Contamination Metrology

 

TXRF-V310

INTEGRATED VPD-TXRF SPECTROMETER

TXRF-V310

 

For The Highest Sensitivity Wafer Surface Contamination Metrology

 

TXRF spectrometers are widely used to measure contamination in the semiconductor fabrication process. TXRF technique allows non-destructive analysis for most all elements (Na~U) in the periodic table. TXRF spectroscopy is possible due to the property of X-rays as they irradiate the surface of a wafer. Each material has a unique critical angle. If the incident angle of the X-rays is above the acute angle, the X-rays penetrate the surface deeply; if the incident angle is smaller than the critical angle, total reflection occurs. In the total reflection condition, fluorescence X-rays will occur only from contamination on the surface, and the substrate material will not add background noise to the measurement. The penetration depth of the incident X-rays under the conditions of total reflection is theoretically around 5 nm, and thus TXRF is classified as a surface analysis technique.                                

APPLICATION SAMPLE

Evaluation of spatial distribution of contamination on wafer surfaces by TXRF

rotating anode txrf

TXRF ROTATING ANODE

  • Higher count rates
  • Higher sensitivity
  • Faster count times
  • Enables W-M excitation of light elements

TXRF MEASUARABLE ELEMENTS 

TXRF Measurable elements periodic table

Learn more about txrf technique

TXRF TOTAL REFLECTION X-ray Fluorescence

Rigaku Yamanashi Japan BNW
Rigaku Yamanashi Factory - Japan

Who we are

Rigaku Semiconductor Metrology Division

Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

 
CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.
 
CORPORATE MOTTO
Value our customers, value our people, and value our technology.