SCHEDULE A DEMO - Onyx 3000

     

    Image - Onyx 3000

    SCHEDULE A DEMO - Onyx 3000

     

    FEATURES & BENEFITS

    • Micro-spot X-ray beam and pattern recognition
    • 2D- and 3D- optical characterization of device structures
    • High-throughput, blanket- and product-wafer measurements
    • Wide range of materials and applications
    • Metal film stacks thickness measurements
    • Feature dimensions measuring
    • Detection and analysis of voids or missing layers
    • High resolution and precision covering thicknesses from Ångstroms to microns
    • Helium purged measurement environment for light-element sensitivity 
    • Configurable for 300mm and smaller wafers