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WAFER inspection and metrology

X-ray metrology techniques

semiconductor metrology learning resources

Setting the Industry Standards

Rigaku Semiconductor Metrology Division

Provides the most reliable solutions to aid your metrology issues and keep growing over the device generations, with the highest throughput and compelling cost of ownership.

Non-Destructive 3D Measurement Technology

Process Monitoring

Metrology Automation

Nanoscopic 3D Structures

Monitoring from lab to fab

Thin Film Characterization

Wafer Contamination Monitoring

Ultra-thin single-layer films to multi-layer stacks

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WD-XRF

WAVELENGTH DISPERSIVE

X-RAY FLUORESCENCE

EXPLORE WD-XRF
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TXRF

TOTAL REFLECTION

X-RAY FLUORESCENCE 

EXPLORE TXRF
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XRR

X-RAY REFLECTOMETRY

 

EXPLORE XRR
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ED-XRF

Energy Dispersive

X-Ray Fluorescence

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CD-SAXS

Critical-Dimension Small-Angle

X-ray Scattering

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HR-XRD

High Resolution

X-Ray Diffraction

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XRF

 

X-RAY FLUORESCENCE

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XRD

 

X-RAY difraction

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