XTRAIA® MF-2000
PROCESS ED-XRF, XRR, AND XRD METROLOGY FAB TOOL
XTRAIA® MF-2000
XRR, ED-XRF, XRD METROLOGY OPTIMIZED FOR HIGH-VOLUME MANUFACTURING
The Rigaku XTRAIA MF-2000 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultra-thin single-layer films to multi layer stacks.
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Micro-spot, monochromatic X-ray beams, and pattern recognition
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High-throughput, product-wafer measurements
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Wide range of materials and applications
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High resolution and precision covering thicknesses from Ångstroms to microns
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For 200 mm (and smaller) wafers with open cassette and SMIF load port configurations
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Available with SECS/GEM communication
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Design based on SEMI S2 and SEMI S8