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XTRAIA MF-2000 Transparent-1

XTRAIA® MF-2000

PROCESS ED-XRF, XRR, AND XRD METROLOGY FAB TOOL

XTRAIA® MF-2000

XRR, ED-XRF, XRD METROLOGY OPTIMIZED FOR HIGH-VOLUME MANUFACTURING

The Rigaku XTRAIA MF-2000 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultra-thin single-layer films to multi layer stacks.

Micro-spot, monochromatic X-ray beams, and pattern recognition

High-throughput, product-wafer measurements

Wide range of materials and applications

High resolution and precision covering thicknesses from Ångstroms to microns

For 200 mm (and smaller) wafers with open cassette and SMIF load port configurations

Available with SECS/GEM communication

Design based on SEMI S2 and SEMI S8