CUTTING-EDGE X-RAY METROLOGY SOLUTIONS
waferx 310 Wavelength-Dispersive X-ray Fluorescence simultaneous spectrometer
FEATURES & BENEFITS
- Patented "diffraction avoidance" capability for accurate XRF results
- High-sensitivity Boron analysis (with AD-Boron channel)
- Solid-state, oil-free x-ray generator
- FOUP, SMIF, and through-the-wall configurations are available to meet the various needs of high-volume manufacturing wafer fabs
- GEM300 Software
- Auto Calibration
- SEMI S2/S8 Compliance
- Robotic wafer handling and fully automated operation
