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SEMICONDUCTOR METROLOGY WEBINAR

Adventures in Wavelength Dispersive X-ray Fluorescence (WD-XRF): Flexible Element Analysis for Thin Films and More

 

 

In this webinar, you will find out how WDXRF enables these analytical advantages and explore ways it can be used in thin film and bulk material optimization and quality control. Meredith Beebe breaks down the fundamentals of WDXRF and will showcase examples of its use in solving manufacturing challenges with photovoltaics, semiconductors, and other advanced materials and devices.

You will learn:

    1. Why does peak resolution matter in elemental analysis? How does WDXRF achieve a peak resolution substantially greater than EDXRF?
    2. How does WDXRF compare with energy-dispersive x-ray spectroscopy thin film analysis?
    3. How are WDXRF composition measurements made? How can WDXRF be used to analyze film thickness?
    4. What kinds of problems can WDXRF solve? In what industries is it most relevant?
    5. What makes the Rigaku AZX 400 WDXRF instrument at Covalent unique?

WDXRF systems have low background noise (as low as 1/10th the background intensity of peaks in EDXRF), improved interference removal, and up to ~10-20 times better peak resolution. Their high precision has made WDXRF systems the gold-standard in metallurgy and geological applications and important metrology tools for thin film research and manufacturing.

This webinar is provided in partnership with Covalent Metrology

 

 

 

 

 

 

 

 

 

 

 

 

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RECOMMENDED RIGAKU SEMICONDUCTOR METROLOGY TOOLS

AZX 400 Transparent Bcakground

AZX 400

Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples

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Meredith Beebe

Meredith Beebe | Semiconductor X-ray Metrology Specialist

Rigaku Americas Corporation | California, USA

meredith.beebe@rigaku.com |

Meredith Beebe is a semiconductor X-ray metrology specialist with unique perspective having significant experience both as an end user in the fab as a process characterization engineer and as an applications expert for multiple vendors supporting customers with a broad range of technological challenges. Meredith has worked in the semiconductor industry for over 20 years and is a subject matter expert known across the industry for trace metal and contamination analyses employing X-rays, VPD-ICP-MS, SIMS, AFM, and Auger. Meredith helps people understand and develop improved strategies for contamination monitoring, metrology optimization, and she provides key insights from direct customer experience to contribute to Rigaku’s leadership in X‑ray metrology.