Rigaku MRAM Metrology Solutions

Rigaku MRAM metrology solutions address process requirements for film thickness and composition as well as surface contamination monitoring.

 

The table below describes thickness and composition measurement possibilities.

Follow the links to the right for details.

 

RIGAKU METROLOGY SOLUTIONS...

...for MRAM Layer Thickness, Density & Roughness

Explore Metrology for MRAM Layers

...for MTJ Layer Thickness & Composition

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Explore Metrology for MTJ Layers

...for Substrate Back Side Contamination

Explore Substrate Back Side Contamination