
SEMICONDUCTOR X-RAY METROLOGY tools
Cutting-edge Metrology Solutions for R&D and high-volume manufacturing

RIGAKU SEMICONDUCTOR METROLOGY DIVISION
Semiconductors and Micro-electronics X-ray Metrology Solutions
for in-process R&D and high-volume manufacturing.
Rigaku Semiconductor Metrology Division specializes in providing XRF, XRD, and XRR metrology and inspection tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure.
With global 24/7 service and support, Rigaku Semiconductor Metrology Tools delivers cutting-edge solutions for yield enhancement and process development.
X-ray Metrology Tools

Advanced Process Technology
Market needs:
- 3D NAND
- PCM
- GAA-FET
- 2.5/3D PKG
Technological Challenges
- Ultra thin film
- Formation ALD
- High AR
- 3D Integration
- New Materials
- Improve reliability
Our Solutions
- Thickness
- Composition
- CD and profile
- Tilt and overlay
- Metal fill
- Crystallinity
- Texture
- Surface metal contamination
- High sensitivity

Power Device
300 mm Si-IGBT, SiC, GaN, GaO, and Diamond
Market needs:
- Si-IGBT
- SiC-MOSFER
- GaN-MOSFET
- GaO-MOSFET
Technological Challenges
- Reduce crystal defects
- Improve reliability
- New materials and dopants
- High quality epitaxy
Our Solutions
- Defect (BPD, TSD, etc.)
- High resolutions
- High throughput.
- Surface metal contamination
- Light element
- Stacking film thickness and composition
- Crystallinity and stress 200 mm full map

IoT | MEMS | Sensor | RF device PZT, GST, TMR, AlN, AlCu, GaN/Si, GaAs, InP
Market needs:
- MEMS
- Filter
- Sensor
- GaN-HEMT
Technological Challenges
- High performance and sensitivity
- New materials
- Packing
- Improve reliability
Our Solutions
- High precision
- Stacking film thickness
- Composition
- Crystallinity
- Texture 50 μm spot
- Micro area 10 μm spot
- Surface metal contamination

FREE CONSULTATION
GET A DEMO
How we work with you

1 - FREE CONSULTATION
A CALL TO UNDERSTAND YOUR CHALLENGES
NEED TO REDUCE COSTS?
NEED A SPECIFIC APPLICATION?
HOW CAN WE HELP YOU?
2 - GET A DEMO
SCHEDULE A DEMO ON YOUR TERMS
ON-DEMAND RECORDINGS
LIVE VIRTUAL & CUSTOM
IN-PERSON GROUPS & INDIVIDUAL

3 - GET A QUOTE
BUILD SOLUTIONS PACKAGE RIGHT FOR YOUR NEEDS
TECHNOLOGY
INSTALL & TRAINING
SUPPORT & SERVICE

Who we are
Rigaku Semiconductor Metrology Division
Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.
CORPORATE MISSIONTo contribute to the enhancement of humanity through scientific and technological development.
CORPORATE MOTTO
Value our customers, value our people, and value our technology.