
RIGAKU SEMICONDUCTOR METROLOGY TOOLS
Semiconductors and Micro-electronics X-ray Metrology Solutions for in-process R&D and high-volume manufacturing.
Rigaku Semiconductor Metrology Division specializes in providing XRF, XRD, and XRR metrology and inspection tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure.
With global 24/7 service and support, Rigaku Semiconductor Metrology Tools delivers cutting-edge solutions for yield enhancement and process development.
X-ray Metrology Tools
Advanced Process Technology
Market needs:
- 3D NAND
- PCM
- GAA-FET
- 2.5/3D PKG
Technological Challenges
- Ultra thin film
- Formation ALD
- High AR
- 3D Integration
- New Materials
- Improve reliability
Our Solutions
- Thickness
- Composition
- CD and profile
- Tilt and overlay
- Metal fill
- Crystallinity
- Texture
- Surface metal contamination
- High sensitivity
Power Device
300 mm Si-IGBT, SiC, GaN, GaO, and Diamond
Market needs:
- Si-IGBT
- SiC-MOSFER
- GaN-MOSFET
- GaO-MOSFET
Technological Challenges
- Reduce crystal defects
- Improve reliability
- New materials and dopants
- High quality epitaxy
Our Solutions
- Defect (BPD, TSD, etc.)
- High resolutions
- High throughput.
- Surface metal contamination
- Light element
- Stacking film thickness and composition
- Crystallinity and stress 200 mm full map
IoT | MEMS | Sensor | RF device PZT, GST, TMR, AlN, AlCu, GaN/Si, GaAs, InP
Market needs:
- MEMS
- Filter
- Sensor
- GaN-HEMT
Technological Challenges
- High performance and sensitivity
- New materials
- Packing
- Improve reliability
Our Solutions
- High precision
- Stacking film thickness
- Composition
- Crystallinity
- Texture 50 μm spot
- Micro area 10 μm spot
- Surface metal contamination
ADVANCED METROLOGY FOR SEMICONDUCTOR PROCESS R&D AND MANUFACTURING
PROVEN MATERIAL ANALYSIS, IDENTIFICATION, & QUANTITATION TO HELP YOU PROVIDE SAFE, EFFECTIVE, & TRUSTWORTHY PRODUCTS
DISCOVERY
Cutting-edge technologies and applications designed to help you discover your next breakthrough with certainty.
PREFORMULATION
Precise solutions to help you characterize solid forms quickly without breaking the bank.
FORMULATION
Customized solutions to ensure product consistency, tracking solid form changes and phase relationships throughout drug formulation.
MANUFACTURING/QC
Rigaku technology, training, and service keep you up and running to confirm product quality at every step of the process.
TRUSTED APPLICATIONS
SOLVING YOUR MOST PRESSING PROBLEMS
- ADVANCED PROCESS TECHNOLOGY
Polymorphs
LEARN MOREMelting Point
LEARN MOREPhase Analysis
LEARN MOREMetal Contamination
LEARN MOREIncoming Material ID
LEARN MORETRUSTED SUPPORT

"The significant reductions in analysis time have freed up valuable QC resources, not to mention costs associated with external laboratory analysis."

"We use Progeny at every point in our manufacturing."

"Another thing I like about Progeny is the software as it relates to data integrity, ALCOA and those type of principals that you're operating under a GMP environment."
OUR COMMITMENT TO CUSTOMERS
- RESPONSIVE PHONE SUPPORT
- DEPENDABLE
- FAST SERVICE
TRUSTED SOLUTIONS
ADVANCED ANALYTICAL PRODUCTS & TRAINING
MINIFLEX BENCHTOP XRD
MORE INFOSMARTLAB INTELLIGENT XRD
MORE INFOZSX PRIMUS IV WDXRF
MORE INFONEX DE BENCHTOP EDXRF
MORE INFONANO3DX X-RAY MICROSCOPE
MORE INFOPROGENY HANDHELD RAMAN
MORE INFOXTALAB SYNERGY SERIES SINGLE CRYSTAL XRD
MORE INFOXTALAB SYNERGY-ED SINGLE CRYSTAL XRD
MORE INFODSCVESTA THERMAL ANALYSIS
MORE INFOHOW WE WORK WITH YOU

1 - FREE CONSULTATION
A CALL TO UNDERSTAND YOUR CHALLENGES
NEED TO REDUCE COSTS?
NEED A SPECIFIC APPLICATION?
HOW CAN WE HELP YOU?
2 - GET A DEMO
SCHEDULE A DEMO ON YOUR TERMS
ON-DEMAND RECORDINGS
LIVE VIRTUAL & CUSTOM
IN-PERSON GROUPS & INDIVIDUAL

3 - GET A QUOTE
BUILD SOLUTIONS PACKAGE RIGHT FOR YOUR NEEDS
TECHNOLOGY
INSTALL & TRAINING
SUPPORT & SERVICE
TRUSTED PARTNER
Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.
CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.
CORPORATE MOTTO
Value our customers, value our people, and value our technology.