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RIGAKU SEMICONDUCTOR METROLOGY TOOLS

Semiconductors and Micro-electronics X-ray Metrology Solutions for in-process R&D and high-volume manufacturing.

Rigaku Semiconductor Metrology Division specializes in providing XRF, XRD, and XRR metrology and inspection tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. 

With global 24/7 service and support, Rigaku Semiconductor Metrology Tools delivers cutting-edge solutions for yield enhancement and process development.

X-ray Metrology Tools

Advanced Process Technology

 

Market needs:

  • 3D NAND
  • PCM
  • GAA-FET
  • 2.5/3D PKG

Technological Challenges

  • Ultra thin film
  • Formation ALD
  • High AR
  • 3D Integration
  • New Materials
  • Improve reliability

Our Solutions

  • Thickness
  • Composition
  • CD and profile
  • Tilt and overlay
  • Metal fill
  • Crystallinity
  • Texture
  • Surface metal contamination
  • High sensitivity

 Power Device
300 mm Si-IGBT, SiC, GaN, GaO, and Diamond

Market needs:

  • Si-IGBT
  • SiC-MOSFER
  • GaN-MOSFET
  • GaO-MOSFET

Technological Challenges

  • Reduce crystal defects
  • Improve reliability
  • New materials and dopants
  • High quality epitaxy

Our Solutions

  • Defect (BPD, TSD, etc.)
  • High resolutions
  • High throughput.
  • Surface metal contamination
  • Light element
  • Stacking film thickness and composition
  • Crystallinity and stress 200 mm full map

 IoT | MEMS | Sensor | RF device PZT, GST, TMR, AlN, AlCu, GaN/Si, GaAs, InP

Market needs:

  • MEMS
  • Filter
  • Sensor
  • GaN-HEMT

Technological Challenges

  • High performance and sensitivity
  • New materials
  • Packing
  • Improve reliability

Our Solutions

  • High precision
  • Stacking film thickness
  • Composition
  • Crystallinity
  • Texture 50 μm spot
  • Micro area 10 μm spot
  • Surface metal contamination

ADVANCED METROLOGY FOR SEMICONDUCTOR PROCESS R&D AND MANUFACTURING

PROVEN MATERIAL ANALYSIS, IDENTIFICATION, & QUANTITATION TO HELP YOU PROVIDE SAFE, EFFECTIVE, & TRUSTWORTHY PRODUCTS

DISCOVERY

Cutting-edge technologies and applications designed to help you discover your next breakthrough with certainty.

PREFORMULATION

Precise solutions to help you characterize solid forms quickly without breaking the bank.

FORMULATION

Customized solutions to ensure product consistency, tracking solid form changes and phase relationships throughout drug formulation.

MANUFACTURING/QC

Rigaku technology, training, and service keep you up and running to confirm product quality at every step of the process.

TRUSTED APPLICATIONS

SOLVING YOUR MOST PRESSING PROBLEMS

  • ADVANCED PROCESS TECHNOLOGY

TRUSTED SUPPORT

OUR COMMITMENT TO CUSTOMERS

  • RESPONSIVE PHONE SUPPORT
  • DEPENDABLE
  • FAST SERVICE

TRUSTED SOLUTIONS

ADVANCED ANALYTICAL PRODUCTS & TRAINING

HOW WE WORK WITH YOU

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1 - FREE CONSULTATION

A CALL TO UNDERSTAND YOUR CHALLENGES

NEED TO REDUCE COSTS?

NEED A SPECIFIC APPLICATION?

HOW CAN WE HELP YOU?

CONTACT US
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2 - GET A DEMO

SCHEDULE A DEMO ON YOUR TERMS

ON-DEMAND RECORDINGS

LIVE VIRTUAL & CUSTOM

IN-PERSON GROUPS & INDIVIDUAL

GET A DEMO
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3 - GET A QUOTE

BUILD SOLUTIONS PACKAGE RIGHT FOR YOUR NEEDS

TECHNOLOGY

INSTALL & TRAINING

SUPPORT & SERVICE

GET A QUOTE

TRUSTED PARTNER

WHO WE ARE
Semiconductors have the power to change the world for the better. Here at Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

CORPORATE MISSION
To contribute to the enhancement of humanity through scientific and technological development.

CORPORATE MOTTO
Value our customers, value our people, and value our technology.
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